Abstract
A method of manufacturing the grooves of the end seals from high-strength dielectric materials is proposed. Uneven depth (no more than 10%) imposes a limit on the processing time. Grooves with a depth of ∼5 μm in corundum substrates can be made using a source of fast argon atoms in ∼1 hour with their energy of 3 keV and equivalent beam current of 1 A.
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