Abstract
The aim of the paper is to study the electrochemical micromachining (µECM) tool preparation technique and in particular it investigates the effects of µECM parameters such as applied potential, electrolytic concentration, tool positions on final tool shape and dimensions. During microtool fabrication, tungsten microshafts of 0.38 mm are electrochemically etched to make the desired cylindrical tools with conical tips. Electrolyte concentrations are varied in the range of 0.1–1.4 M for the potential differences of 9 V and 15 V AC. The shape and size of the tools are also determined for each set of experiments. The tools thus fabricated are used to fabricate single–hole micronozzle and multiple–holes micronozzle array. Entrance and exit diameters of micronozzles fabricated are measured by SEM and compared to tool geometry.
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