Abstract
In this paper, the problem of the quantitative characterization of thermal resistance fields in a multilayer sample is addressed by using the classical front face flash method as the thermal excitation and infrared thermography (IRT) as the monitoring sensor. In this challenging problem, the complete inverse processing of a multilayer analytical model is difficult due to the lack of sensitivity of some parameters (layer thickness, depth of thermal resistance, etc.) and the expansive computational iterative processing. For these reasons, the proposed strategy is to use a simple multilayer problem where only one resistive layer is estimated. Moreover, to simplify the inverse processing often based on iterative methods, an asymptotic development method is proposed here. Regarding the thermal signal reconstruction (TSR) methods, the drawback of these methods is the inability to be quantitative. To overcome this problem, the method incorporates a calibration process originating from the complete analytical quadrupole solution to the thermal problem. This analytical knowledge allows self-calibration of the asymptotic method. From this calibration, the quantitative thermal resistance field of a sample can be retrieved with a reasonable accuracy lower than 5%.
Highlights
In the domain of material and microelectronic device characterizations, many groups and studies have emerged with the goal to estimate both the thermal properties and resistance of these thin multilayers
To simplify the inverse processing often based on iterative methods, an asymptotic development method is proposed
The obtained results are plotted in Figure 6: From these measurements, 5 regions of interest (ROIs) appeared
Summary
In the domain of material and microelectronic device characterizations, many groups and studies have emerged with the goal to estimate both the thermal properties and resistance of these thin multilayers. One of the most common procedures is based on the 3ω technique [1], which has been extensively used since it offers absolute measurements of the heat flux and the temperature and is well suited for characterizations at low temperatures. Contactless photothermal methods, such as the thermoreflectance [2,3] and infrared radiometry [4,5,6] techniques, have been implemented and allow measuring the relative change in temperature and heat flux. Calibration is a complex task within those experimental configurations. In this community, very few studies are based on field characterizations. Within the research groups involved in quantitative infrared thermography, many authors have developed a technique for qualitative in-depth defect
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