Abstract

As a visualization technique of the surface magnetic structure, the type-I magnetic contrast in a scanning electron microscope is proposed. Trajectories of secondary electrons emitted from the specimen surface are deflected by the magnetic flux that leaks from the surface magnetic domain. The magnetic flux and an electric field in the specimen chamber are calculated numerically for a given magnetic structure of the specimen, and the spatial deviation of the electrons at the detector is obtained. By an analysis of the relationship between the structure and the deviation, it is expected that the magnetic structure can be estimated by the deviation, as the inverse problem. In the present paper, this relationship is examined under various conditions, and rules are derived to interpret the results into the magnetic structure of the specimen.

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