Abstract
In this paper, electrode sputtering of the miniature linear accelerator (MLA)is investigated. The main part of this study is numerical simulations of the deposited metal layers formation on the insulator. It consist of three parts: ion beam trajectory analysis in MLA using COMSOL Multiphysics, simulations of surface sputtering by BCA codes (SRIM, SDTrimSP, and SCATTER) and sputtered particles trajectory analysis in MLA using COMSOL Multiphysics. The main sources of deposited particles are identified using numerical simulations of the surface sputtering by the ions extracted from the Penning ion source (PIS) and charge-exchange neutrals originated inside the ion-optical system (IOS) and subsequent analysis of the sputtered particle trajectories. Experimental data were obtained by digitizing MLA photos during operation by ImageJ software. Simulations of the electrodes sputtering of MLA were performed. The simulations allowed to determine the erosion zones responsible for the deposited metal layer formation on the insulator surface. The experimental data are in good qualitative agreement with the simulated ones.
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