Abstract
Thin monolayer films of molybdenum and carbon were deposited by an electron beam evaporation system equipped with an in situ soft X-ray reflectivity monitoring instrument. The densities of the films were estimated from reflectivity measurements during deposition. The densities of the films were about 20% below the bulk value. It was proved that this film density decrease cannot be ignored in estimating the surface roughness by optical measurements. The rms roughness estimated from reflectivity measurements of the monolayer films by correcting the density was in good agreement with the STM results.
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