Estimation of the characteristic parameters of the multilayered film model using the patterson differential function

Abstract

The possibility of estimating the layered film structural parameters by constructing the autocorrelation function P F (z) (referred to as the Patterson differential function) for the derivative dρ/dz of electron density along the normal to the sample surface has been considered. An analytical expression P F (z) is presented for a multilayered film within the box model of the electron density profile. The possibilities of selecting structural information about layered films by analyzing the features of this function are demonstrated by model and real examples, in particular, by applying the method of shifted systems of peaks for the function P F (z).