Abstract

In this study, the static pull-in instability of beam-type micro-electromechanical system (MEMS) is theoretically investigated. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size dependent Euler-Bernoulli beam model is used based on a modified couple stress theory, capable of capturing the size effect. Two supervised neural networks, namely, back propagation (BP) and radial basis function (RBF), have been used for modeling the static pull-in instability of microcantilever beam. These networks have four inputs of length, width, gap, and the ratio of height to scale parameter of beam as the independent process variables, and the output is static pull-in voltage of microbeam. Numerical data employed for training the networks and capabilities of the models in predicting the pull-in instability behavior has been verified. Based on verification errors, it is shown that the radial basis function of neural network is superior in this particular case and has the average errors of 4.55% in predicting pull-in voltage of cantilever microbeam. Further analysis of pull-in instability of beam under different input conditions has been investigated and comparison results of modeling with numerical considerations show a good agreement, which also proves the feasibility and effectiveness of the adopted approach.

Highlights

  • Micro-electromechanical systems (MEMS) are widely being used in today’s technology

  • In order to obtain different pull-in instability parameters and output features for training and testing of neural networks, a series of numerical analysis was performed on a MAPLE package

  • Two supervised neural networks have been used for the static pull-in instability voltage of microcantilever beams

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Summary

Introduction

Micro-electromechanical systems (MEMS) are widely being used in today’s technology. One of the significant fields of study is the stability analysis of the parametrically excited systems. Investigating stability analysis on parametrically excited MEM systems is of great importance. The static pull-in behavior of MEMS actuators has been studied for over two decades without considering the Casimir force [4,5,6]. Osterberg and Senturia [4] and Osterberg et al [5] investigated the pull-in parameters of the beam-type and circular MEMS actuators using the distributed parameter models. Beni et al [7], Koochi et al [8] and Ghalambaz et al [9] investigated the effect of Casimir force on the pull-in behavior of beamstype NEMS. Moghimi Zand and Ahmadian [11] investigated the pullin behavior of multilayer microplates using finite element

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