Estimation of Plasma Parameters for Microwave‐Sustained Ar/He Plasma Jets at Atmospheric Pressure

Abstract

AbstractIn this article, we have analyzed the measured probe characteristics of microwave‐sustained Ar and He plasma jets at atmospheric pressure using the high‐pressure probe theory developed by Talukder et al. in order to determine the generated plasma parameters (electron temperature, Te, electron density, Ne, plasma potential, ϕp). The calculation shows some unusual temperature profiles (both axial and radial) as well as provides some over estimation of electron temperature measured from the distorted I‐V characteristic due to a smaller electron to ion saturation current ratio coming from the limited electron saturation current. In order to overcome these limitations, the measured probe characteristics are also analyzed by using the asymmetric double probe theory developed by our group, which provides reasonable value of plasma parameters. The influence of microwave power and gas flow rate on the plasma parameters are also investigated (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)