Abstract
AlN has been widely used as the piezoelectric thin film layer in film bulk acoustic wave resonator (FBAR). The performance of FBAR is influenced by various geometrical parameters and losses from piezoelectric material such as thermoelastic damping and material damping. This research focuses on the estimation of material damping coefficients (α and β) of the AlN by using the Akhieser approximation to estimate more accurate values of the coefficients, thus a more realistic value of the quality (Q) factor is achieved for FBAR operating at Ku-band frequency ranges (12 GHz-18 GHz).
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