Abstract
Spherical fine ZrO2-SiO2 (1∶1) particles were synthesized from a hydrolysed mix-solution of Si(OC2H5)4 and ZrOCI2 · 8H2O by ultrasonic spray pyrolysis, and the formation mechanism of the particles discussed. All of the resultant particles identified as t-ZrO2 and amorphous SiO2 with an atomic order dispersion were spherical, and mainly of diameter 0.8 to 1.0μm. It was estimated that the three-dimensional ladder siloxane chains containing an equimolar Zr4+ homogeneously dispersed were formed by hydrolysis, and an atomized droplet itself converted into an isolated ZrO2-SiO2 (1∶1) particle without aggregation.
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