Abstract

In this work; Silicon dioxide (SiO2) were fabricated by pulsedlaser ablation (PLA). The electron temperature was calculated byreading the data of I-V curve of Langmuir probe which wasemployed as a diagnostic technique for measuring plasma properties.Pulsed Nd:YA Glaser was used for measuring the electrontemperature of SiO2 plasma plume under vacuum environment withvarying both pressure and axial distance from the target surface. Theelectron temperature has been measured experimentally and theeffects of each of pressure and Langmuir probe distance from thetarget were studied. An inverse relationship between electrontemperature and both pressure and axial distance was observed.

Highlights

  • Laser matter interaction has explored many dimensions on the basis of laser ablation in fundamental studies and technological applications including thin films deposition, production of microclusters, cutting, drilling, surface treatment, laser patterning, fabrication of micro and nano-electronic devices, magneto hydrodynamic generators, etc

  • Some species can be directly vaporized as ionized fragments, plasma formation can be mainly ascribed to a number of processes taking place in the second step

  • In laser induced plasmas (LIPs), equilibrium in the radiation process is hardly achieved because the plasma is normally thin and most of the radiated photons cannot be reabsorbed by the plasma

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Summary

Introduction

Laser matter interaction has explored many dimensions on the basis of laser ablation in fundamental studies and technological applications including thin films deposition, production of microclusters, cutting, drilling, surface treatment, laser patterning, fabrication of micro and nano-electronic devices, magneto hydrodynamic generators, etc. Key words Laser induced plasma, Langmuir probe, electron temperature, SiO2 thin film. Laser induced plasma is transient in nature whose characteristics depend on laser parameters, target material and ambient conditions, which may vary radically along axial and radial direction [1].

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