Estimation of Activation and Compensation Ratios in Al<sup>+</sup> Ion Implanted 4H-SiC: Comparison of Two Methodologies

Abstract

Activation and compensation ratios feature the electrical doping efficiency of a semiconductor material by ion implantation. The estimation of these ratios requires a quantitative evaluation of the density of the implanted dopant in substitutional position and of the density of the compensator centers after the mandatory post implantation annealing treatment. In the case of Al+ ion implanted 4H-SiC, it is a common habit to determine acceptor density, compensator density and acceptor thermal ionization energy by fitting the curve of the drift holes temperature dependence with the charge neutrality equation. However, this strategy could lead to ambiguous results. In fact, this study shows several cases of Al+ ion implanted 4H-SiC of interest for electronic device fabrication, where at least two sets of such fitting outputs can reproduce the same experimental curve within the uncertainty of the data. Provided that a model for the carrier transport could be set-up, the contemporaneous fits of the temperature dependence of drift hole density and of drift hole mobility is proposed to alleviate the uncertainty of the estimated acceptor density, compensator density and acceptor thermal ionization energy.