Estimating the Interrelation between the Rate of Atomic Layer Deposition of Thin Platinum-Group Metal Films and the Molecular Mass of Reactant Precursors

Abstract

The published data on the atomic layer deposition of thin platinum-group metal (Ru, Rh, Pd, Os, Ir, and Pt) films with the use of different reactant precursors and second reactants (O2, O3, H2, etc.) are generalized in the context of microelectronic technologies. A procedure for analyzing the data on the atomic layer deposition kinetics is discussed. The rate of atomic layer deposition of metallic ruthenium is not higher than 0.15 nm/cycle. An inverse dependence of the limiting atomic layer deposition growth rate on the precursor molecular mass is established. The rates of atomic layer deposition of thin films of all the remaining metals in the group range between 0.03–0.07 nm/cycle, which is lower than the values for a monolayer of these metals by several times. The methodology and ways of enhancing the reliability of the kinetic data on the atomic layer deposition are discussed, including the need for taking into account the sample surface types and effects of nucleation delays at the initial growth stages of the thin platinum-group metal film. The possible occurrence of chemical deposition reactions with intermediate products involved at the pulsed injection of the reactants is considered.