Abstract
In this study we calculate the measurement error values generated by the Abel inversion and the numerical method in Ar ICP diagnostics. We used a simple mathematical model to simulate the conditions in the Ar ICP. The results of this study indicated that the measurement errors increased with increasingly greater peak position error. The signal in the center had the highest measurement error values, and they decreased with the increase in the distance from the center. It is concluded that in order to keep measurement error values below 5%, the peak position error must be kept under 1.0% of the plasma diameter.
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