Establishment and verification of the analytical model for the critical parameters in the kinematics model of the precision positioning stage

Abstract

This paper conducts a specific analysis further to improve the predicted accuracy of the output displacement of the positioning stage. Firstly, the kinematical model of the positioning stage is established based on Hooke's law, and the research is carried out by solving the critical parameters in this model. In the research, the analytical method from part to whole is adopted to analyze the bridge-type displacement amplifier (BDA). The analytical model of the critical parameters in the kinematical model of the positioning stage is established by using the geometric relations of the structure, the theory of Euler-Bernoulli beam, and the refined beam theory. The theoretical model is compared with linear static analysis of finite element (L-FEA) and nonlinear static analysis of finite element (NL-FEA), respectively. In comparison, it is found that the analytical model has high predicted accuracy. Finally, finite element analysis (FEA) and experiments verify the correctness of the whole analytical process.