Abstract
A variety of diamond films of poor and good quality are synthesized by microwave plasma CVD from a mixture of hydrogen and CH4, CH3OH or C2H5OH. A comparative study on the ESR and Raman spectra of these films is performed. The diamond films of good quality have a spin density of ∼1018 cm-3. The peak-to-peak linewidth in the ESR signal varies from 6.1 G in the film of poor quality to 3.0 G in the film of good quality. This change can be used as a convenient method for evaluating the quality of diamond films.
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