Abstract
A LEO SUPRA 35VP FESEM has been modified to significantly improve image quality in the low pressure mode of operation. It is further shown that the same conversion can allow the machine to operate also as a fully fledged environmental scanning electron microscope with specimen chamber pressures in excess of 2000Pa. This is achieved by a diamagnetic insert with a thin pressure limiting aperture at the bottom of the pole-piece. The insert allows the use of various size apertures in addition to the existing 1mm differential diaphragm.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
