ESD detection by transient earth voltage

Abstract

We measured transient earth voltages (TEVs) accompanied with electrostatic discharges (ESDs) to investigate the possibility of ESD detection using the TEV. Clear TEV signals could be observed in spark, brush, and propagating brush discharges even when an ESD event detector failed. Therefore, ESD detection using the TEV may be significantly more effective as an auxiliary monitor, while the TEV signals accompanied with cone discharges could not obviously be detected. In addition, the features of the TEV depend on the type of ESDs; therefore, the TEV could also be used to identify the potential of the occurrence of problems and hazards by ESDs.