Abstract
The application of quartz-crystal resonators for materials science is based on the dependence of acoustic-wave propagation on the film shear modulus and density. In contrast to the well-known chemical-sensor applications, the shear modulus determination of a thin film needs a complete electrical impedance (or admittance) analysis and a complex fitting procedure of the measured responses. This contribution concentrates on different error sources in the procedure to determine shear parameters.
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