Abstract
Modeling of manufacturing tolerances for machining of a monolithic flexure hinge mechanism is presented. This modeling uses a computer-based method to generate the equations of motion for the mechanism and to predict the induced motion errors for various types of machining imperfections. This paper describes the modeling and the quantitative analysis of the motion errors using a well-known simple compound linear spring as an example. Based on the simulation results of the example problem, effects of the machining imperfection types on motion errors are generalized. The simulation demonstrates that the imperfection of the center position and the size of a machined hole provide an in-plane motion error X, Y, θ z. In addition, the machining error in the perpendicularity of the hole with respect to the plate also provides an out-of-plane parasitic error Z, θ y, θ y.
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