Abstract
We used micro-double-staged laminated object manufacturing process (micro-DLOM) to fabricate 3D micromold. Moreover, the error of the micro-DLOM was also studied. Firstly, we got the principle error of the micro-DLOM. Based on the mathematical expression, it can be deduced that the smaller the opening angle α and the steel foil thickness h are, the smaller the principle error δ is. Secondly, we studied the error of femtosecond laser cutting. Through the experimental results, we know that the error of femtosecond laser cutting is 0.5 μm under 110 mW femtosecond laser power, 100 μm/s cutting speed, and 0.75 μm dimension compensation. Finally, we researched the error of microelectric resistance slip welding. Based on the research results, we can know that the minimum error of microcavity mold in the height direction is only 0.22 μm when welding voltage is 0.21 V and the number of slip welding discharge is 160.
Highlights
In recent years, with the development of microelectromechanical systems (MEMS), the microparts have been widely applied in industry areas
In order to investigate the influence which femtosecond laser cutting speed has on the accuracy of 2D micro-structure, we adopted 10 μm thick 0Cr18Ni9 stainless steel foils for microcutting experiment
A gap between stainless steel foils inevitably exists and this gap could affect the dimensional accuracy of micro-cavity in height direction
Summary
With the development of microelectromechanical systems (MEMS), the microparts have been widely applied in industry areas. By using the conventional method, it is difficult to fabricate micro-parts due to their small size and high dimensional accuracy With research in this field, it has appeared a series of modern manufacturing technologies for fabricating micro-parts [1,2,3,4]. Based on the laminated manufacturing principle, Pfeiffer et al used femtosecond laser to ablate 100 μm depth 3D micro-structures in cemented carbide and stainless steel plate [7]. Based on the studies above, we proposed a novel forming process based on femtosecond laser cutting and microelectric resistance slip welding which can fabricate 3D micromold [10, 11]. We analyzed the error of the microDLOM and put forward some methods to reduce the error of the micro-DLOM
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