Abstract
Silicon carbide (SiC) nanostructures were obtained by the chemical deposition of hexamethyldisiloxane (C6H18OSi2) from the vapor phase onto quartz with a supported cobalt catalyst. A study was carried out on the structural and optical properties of the SiC nanostructures obtained at 650, 700, 750, and 800 °C using scanning electron microscopy, XRD, and electron spectroscopy. All the films were found to have crystalline structure. The optical transmittance in the visible region increases with increasing synthesis temperature.
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