Abstract
Figure 7. (Color online) W concentration versus W precursor’s feed ratio for ALD-Co(W) films fabricated at 375 ◦C. On page P314, left column, the first sentence under the heading Resistivity.— should be Figure 9 shows the resistivity of CVD-Co(W) films with 0–14 atom% W concentration, and also shows a Co(W) film fabricated using carbonyl precursors for comparison. Because of electron scattering by minor metal atoms, the resistivity of an alloy is generally higher than that of pure metal.45 On page P314, Figure 9 should be
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