Abstract
Amorphous hydrogenated carbon (a-C:H) deposits were eroded in the afterglow of a NH3 plasma, created with an inductively coupled RF generator in pure NH3 at the gas pressure of 50 Pa. The plasma system was characterised by optical emission spectroscopy and mass spectrometry, and the erosion process was monitored in-situ with a laser interferometry system. Based on the mass spectrometry measurements, the degree of dissociation of the NH3 molecules was estimated at 90% at the highest generator forward power in the discharge region, however the densities of N and H atoms were significantly smaller at the location of the sample holder. The erosion rates were found to increase with surface temperature and forward generator power. In the high dissociation regime, the composition of the afterglow and the reaction products highlight the role of N atoms in the erosion process.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
