Abstract
Semiconductor industries have rapidly become one of the most important industries in Taiwan. Due to the technology promotion and productivity growth, operators have to move more quickly and handle more heavy material in new plants than they did in old plants. Ergonomics checklists were generated for in plant survey. Equipment Safety checklist have been developed to survey facilities or machines in chip fabrication Plants. Moreover, Equipment Safety checklist will be a tool to help IC plants to pass the quality of SEMI-S validation. The results show that SEMI-EC is an appropriate checklist to detect most kinds of ergonomic hazards in semiconductor plants and BRIEF is an appropriate checklist for the operators' musculoskeletal problems investigation.
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