Abstract
The present study shows recent progress in the depth profile of deuterium near the surface of the isotropic graphite and highly oriented pyrolytic graphite (HOPG) obtained by use of the elastic recoil detection (ERD) method. The implantations were made at RT with 8 keV D 2 + ions to fluences up to ∼1022 ions/m 22. The depth distribution curves of the deuterium in HOPG and the isotropic graphite were compared with each other. It was found that deuterium atoms exist in the depth range within 100 nm in HOPG. It agrees with the depth profile computed by using the TRIM3D-code. However, the distribution in the isotropic graphite spreads over the depth range beyond 800 nm.
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