Equilibrium shapes and surface selection of nanostructures in 6H-SiC

Abstract

The equilibrium shape of 6H-SiC nanostructures and their surfaces were studied by analyzing nano-void (∼10 nm) shapes, which were introduced in monocrystalline 6H-SiC by high-temperature neutron irradiation, using transmission electron microscopy. The nano-voids were determined to be irregular icosahedrons truncated with six {1¯100}, twelve {1¯103}, one smaller top-basal, and one larger bottom-basal planes, which suggests that {1¯100} and {1¯103} are the next stable surface class after the basal planes. The relatively frequent absence of the {1¯100} surface in the nano-voids indicated that the (1¯103¯) surface type is energetically rather stable. These non-basal surfaces were found not to be atomically flat due to the creation of nanofacets with half unit-cell height in the c-axis. The {1¯100} and {1¯103} surfaces were classified as two and four face types according to their possible nanofacets and surface termination, respectively. We also discuss the surface energy difference between the (1¯103¯) and (1¯103) face types in relation to the energy balance within the equilibrium, but irregular, polyhedron, in which the (1¯103) surface had double the surface energy of the (1¯103¯) surface (∼3900 erg/cm2).