Abstract

Electron probe microanalysis (EPMA) is presented as a quantitative technique of near-surface chemical characterization. Three principle operation modes are discussed: (1) “Thick” films (> 100 µg/cm2, 0.2 µm for a density of 5 g/cm3 ) are studied by use of a sufficiently low electron energy. (2) The combined determination of film thickness and composition is applied to “thin” films and multilayers (< 250 >g/cm2 , 0.5 >m for a density of 5 g/cm3). Relatively fast analysis at a single electron energy is possible under certain restrictions. (3) The universal approach of non-destructive in-depth analysis is based on combining experiments performed at different electron energies. The operation modes are described with respect to experimental procedures, data reduction models, precision, accuracy and the range of practical applications. EPMA is also related to other techniques of thin film and surface analysis.Keywordselectron probe microanalysis (EPMA)thin filmsmultilayersfilm thicknessnondestructive in-depth analysisNCS382

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