Abstract

Joseph F. AhadianClifton G. Fonstad, Jr.Massachusetts Institute of TechnologyDepartment of Electrical Engineeringand Computer Science77 Massachusetts AvenueRoom 13-3030Cambridge, Massachusetts 02139E-mail: joeah@oevlsi.mit.eduAbstract. Optoelectronic very large scale integrated (OE-VLSI) circuitsare a basic component of optical interconnects proposed to overcomethe limitations of high-speed electrical interconnects. Epitaxy-on-electronics (EoE), a monolithic integration technology capable of com-bining thousands of optoelectronic devices with VLSI-complexity GaAsElectronics, is reviewed. The fundamental assumptions on which theEoE technology is founded are explained and the development of theEoE integration process is reviewed. Then, the recently completedOPTOCHIP research foundry project, which made LED-based optoelec-tronic integrated circuits (OEICs) available to optical interconnect re-searchers, is described. Finally, integrated LED, photodetector, and cir-cuit characterization results are detailed. These results show the utility ofEoE OEICs in implementing optical interconnect architectures and pointout current performance limitations.

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