Epitaxy of highly optical efficient GaN on O and Zn face ZnO

Abstract

ABSTRACTZnO is a highly efficient photon emitter, has optical and piezoelectric properties that are attractive for a variety of applications. Due to its stacking order and close lattice to GaN, it is also considered as a substrate material for GaN epitaxy. In the past the poor preparation of ZnO surface has been a major handicap to GaN epitaxy. However, proper treatment we developed recently can make both faces of ZnO smooth with atomic level terraces. Epitaxy of GaN on O-face and Zn-face ZnO by reactive molecular beam epitaxy was performed. We used low-temperature RF growth of GaN buffer layer on ZnO surface to protect it from both ammonia and Ga. No Ga2ZnO4, an oxide with the spinel structure formed due to reaction of ZnO with Ga, was found, in contrast to earlier reports. The low-temperature photoluminescence (PL) indicates that both faces of ZnO can provide a high quality GaN with high radiative efficiency. In previous research it has been reported that O-face ZnO is slightly better for GaN epitaxy. Our new finding demonstrates that high-quality GaN epilayers can be grown on Zn face of ZnO.