Abstract
La0.67Sr0.33MnO3 (LSMO) manganite thin films were deposited using a magnetron dc sputtering on single crystalline GaAs(001) substrates covered by MgO buffer layers with the goal to fabricate, using MEMS technology, a microbolometer operating at room temperature. The crystalline perfection of the thin film structures are characterized by X-ray diffraction technique, rocking curve measurements, and transmission electron microscopy (TEM). TEM analyses give evidence of the epitaxial growth of the annealed LSMO. Auger Electron Spectroscopy as well as X-ray Photoemission Spectroscopy are used to investigate compositional properties of the films. The analyses show a stoichiometric LSMO film without any contamination except of the surface where we register some traces of As, C and Mg. The temperature dependence of resistance, measured by a standard four-probe technique, exhibits a peak at a temperature of 280 K. The maximum temperature coefficient of resistance reaches a value of ∼2.3% K–1 at T = 249 K. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
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