Abstract
The development of quasi-1D Co3O4/ZnO nanocomposites by a two-step plasma enhanced-chemical vapor deposition (PE-CVD) process is presented. Arrays of ⟨001⟩ oriented ZnO nanorods were first grown on Si(100) and subsequently used as templates for the PE-CVD of Co3O4, whose amount was tailored as a function of deposition time. The obtained composites were thoroughly characterized by means of a multitechnique approach, involving field emission-scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDXS), micro-Raman and Fourier-transform infrared (FT-IR) spectroscopies, X-ray photoelectron and X-ray excited Auger electron spectroscopies (XPS, XE-AES), glancing incidence X-ray diffraction (GIXRD), and reflection high energy electron diffraction (RHEED). The use of moderate deposition temperatures (≤300 °C), together with the unique activation provided by nonequilibrium plasmas, prevented undesired solid-state reactions between the two oxides and promoted Co3O4 growth on the tips of vertic...
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