Epitaxial La-Doped Hf0.5Zr0.5O2 Thin Films with Enhanced Ferroelectric Properties

Abstract

Doping with La is a promising route to improve endurance of ferroelectric Hf0.5Zr0.5O2 film for non-volatile random access memories [1-2]. However, the beneficial effect of La on the endurance of polycrystalline films may be accompanied by degradation of the retention [3]. Here, we have investigated whether this endurance - retention dilemma also occurs in La-doped epitaxial Hf0.5Zr0.5O2 films. Epitaxial 1% La-doped Hf0.5Zr0.5O2 films of thickness in the 4.5 - 13 nm range were deposited by pulsed laser deposition on SrTiO3(001) (STO) and STO/Si(001) substrates, buffered with a La2/3Sr1/3MnO3 electrode. The films structure was studied by X-ray diffraction (XRD) and surface topography was studied using atomic force microscopy. Top Pt electrodes were deposited on top of the films to characterize their ferroelectric properties (polarization, leakage, endurance and retention). Compared to undoped epitaxial Hf0.5Zr0.5O2 films [4-5], large values of polarization are obtained in a wider thickness range, whereas the coercive fields are similar, and the leakage current is substantially reduced. Compared to polycrystalline La-doped films [2-3], wake-up effect of epitaxial La-doped films is limited to a few cycles. Despite fatigue, endurance in epitaxial La-doped films is more than 1010 cycles, and this good property is accompanied by excellent retention of more than 10 years at room temperature. These results demonstrate that the wake-up effect and endurance–retention dilemma are not intrinsic in La-doped Hf0.5Zr0.5O2.