Abstract
The pulsed laser deposition technique has been utilized for thin film synthesis of a continuous series of solid solutions of the end member perovskite compounds SrTiO 3 and SrRuO 3. The SrTi 1 − xRu xO 3 − d (0 ≤ x ≤ 1) films are grown epitaxially on (100)-oriented SrTiO 3 substrates in a low pressure atomic oxygen ambient with in situ monitoring using reflection high-energy electron diffraction (RHEED). The as-deposited films are cubic or pseudocubic over the whole composition range with the lattice parameter increasing continuously with increasing Ru 4+ substitution. Correspondingly, the resistivity evolves from insulating to metallic behavior. The solid solution films are potentially useful as latticed-matched buffer layers for heteroepitaxial growth, or as barrier layers in tunnel junctions with controlled resistive properties.
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