Abstract
X-ray and ultraviolet photoelectron spectroscopies (XPS and UPS) were used to characterize as-deposited epitaxial CrN(001) layers grown in situ. The films were deposited on MgO(001) at 650 °C in pure N2 discharges maintained at a pressure of 5 mTorr (0.67 Pa). Mg Kα and monochromatic Al Kα sources were used to obtain the XPS spectra, while the UPS data was generated by He I and He II UV radiation. Analysis of the results show that the CrN(001) surfaces are free of O and C. A distinct splitting of the Cr 2p3/2 line is also observed. The films were found to be stoichiometric with Rutherford backscattering spectroscopy (RBS) results, yielding a N/Cr ratio of 1.04 ± 0.02. However, composition determined by XPS (N/Cr=0.73) show an excess of chromium.
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