Abstract
EPAS: a generic expert system for advising emitter piloting in IC manufacturing: Y.-K. Yang (Harris Semicond., Melbourne, FL. USA) SOUTH EASTCON '89 Proceedings. Energy and Information Technologies in the Southeast (Cat. No. 89CH2672-4), Columbia, SC, USA, 9–12 April 1989 (New York, NY, USA: IEEE 1989), p. 24–31, vol. 1
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