Abstract
Evolutions of angular distributions and surface composition profiles of a sputtered Pt 0.5 Cu 0.5 alloy were simulated under 1 keV Ar ion bombardment at normal incidence, with the help of a dynamic Monte Carlo program including preferential sputtering and BIGS (bombardment-induced Gibbsian segregation) processes etc. It is found during the PtCu alloy sputtering that the Cu enrichment in the near-normal direction is regularly transformed into the Pt one as the Ar ion fluence increases. Below a low fluence of about 1.7 ions/cm 2 , Cu is preferentially ejected in the near-normal direction; above 1.7 ions/cm 2 , on the other hand, Pt is preferentially ejected in the near-normal direction instead of Cu. Effects of preferential sputtering and BIGS processes on enrichment transformation between Cu and Pt elements in the near-normal direction are also discussed.
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