Abstract

High-performance plasmonic ZnO/Al2O3 spacer/nano-Pt/Al2O3/substrate multilayer structures were prepared by atomic layer deposition, in which the localized surface plasmons (LSP) were supported by the uniformly dispersed nanostructured Pt (nano-Pt) layer and a precise Al2O3 spacer was introduced to suppress luminescence quenching. Over 100-fold enhancement of photoluminescence from the ZnO emitter, which facilitates the observation of significant quantum confinement effect in the nanoscale ZnO layer as thin as ∼2 nm, was achieved. The giant plasmonic enhancement can be deduced from the optimized Al2O3 spacer thickness, which leads to the reduced coupling with nonradiative high-order LSP modes as well as the overlap between the LSP resonance wavelength and the luminescence/absorbance spectra of the ZnO emitter. This plasmonic multilayer structure with high enhancement, accuracy, tunability, uniformity, and reproducibility can be further applied in sensitive bioassays/biosensing and efficient solid-state lighting.

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