Enlargement of the diamond deposition area in combustion flame method by traversing substrate

Abstract

In this study, diamond deposition on traversing substrate was carried out in order to get useful information for utilizing combustion flame method. In the case of stationary substrate, diamond particles were obtained on the condition that C 2H 2/O 2 flow ratio was from 1.00 to 1.15, while no particles could be obtained in oxygen rich environment. However, in the case of traversing substrate, dense diamond belt was deposited without oxidizing of the diamond particles due to oxidative flame. From these results, it was proved that large area deposition by substrate traversing was available even in the case of combustion flame CVD.