Enhancing Wettability of Radio Frequency Magnetron-Sputtered Glass Films by Exploiting Structural Defects.

Abstract

Silica-based films were prepared by radio-frequency magnetron sputtering to investigate the influence of the chemical compositions of the target glass on the structure and wettability of the sputtered films. The sputtered films were more hydrophilic than the untreated glasses. Oxygen defects formed in the silica units of the sputtered films and resulted in the formation of hydroxyl groups, regardless of the chemical composition of the glass. The three-phase contact lines were distorted by chemical heterogeneities on the surfaces of the sputtered films.