Abstract
This work presents an application of reactive ion etching (RIE) followed by diamond-like carbon (DLC) nano-overlay deposition using radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method for effective tuning of the refractive-index (RI) sensitivity of long-period gratings (LPGs). Both etching and deposition take place within one process. Combination of both plasma-based processes allows for well controlled tuning of the LPG sensorial response up to its operation at both dispersion turning point (DTP) of higher order cladding modes and mode transition regime. As a result of processing, RI sensitivity can be enhanced up to over 12,000 nm/RIU per single resonance in narrow RI range (1.3344-1.3355) and over 2000 nm/RIU in broader RI range (1.34-1.356).
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