Abstract

We study the optical and conductivity properties of Fe-doped ZnO (ZnO:Fe) film. ZnO and ZnO:Fe films (0.6 at. % and 1.2 at. % Fe concentration) were deposited using direct-current-unbalanced magnetron sputtering at room temperature. The presence of Fe dopant enhances the photon absorption of ZnO. The I–V and spectroscopic ellipsometry characteristic show that the electrical and optical conductivity of ZnO:Fe is increased. The first-principle calculation confirms the changes in the optical properties and conductivity due to Fe 3d states. The results show the role of Fe doping in modifying the optical and conductivity properties of ZnO film.

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