Enhancing displacement of lead–zirconate–titanate (PZT) thin-film membrane microactuators via a dual electrode design

Abstract

A common design of piezoelectric microactuators adopts a membrane structure that consists of a base silicon diaphragm, a layer of bottom electrode, a layer of piezoelectric thin film, and a layer of top electrode. In particular, the piezoelectric thin film is often made of lead–zirconate–titanate (PZT) for its high piezoelectric constants. When driven electrically, the PZT thin film extends or contracts flexing the membrane and generating an out-of-plane displacement. Many manufacturing defects, however, could significantly reduce the designed actuator displacement. Examples include residual stresses, warping, non-uniform etching of the silicon diaphragm, and misalignment between the top electrode and the silicon diaphragm. The purpose of this paper is to develop a dual top-electrode design to enhance the actuator displacement. In this design, the top electrode consists of two disconnected (thus independent) electrode areas, while a continuous bottom electrode serves as the ground. The two top electrodes are located in two regions with opposite curvature when the diaphragm deflects. When the two top electrodes are driven in an out-of-phase manner, the actuator displacement is enhanced. Finite element analyses and experimental measurements both confirm the feasibility of this design. When manufacturing defects are present, experimental results indicate that the actuator displacement can be optimized by adjusting the phase difference between the dual top electrodes.