Abstract

We investigate the effects of thickness as well as dielectric constant of buried oxide on the digital performance of 30 nm germanium-on-insulator (GeOI) MOSFETs employing extensive TCAD simulation. Furthermore the role of Ge channel thickness on various device metrics is studied. For a GeOI pMOSFET having 10-nm thick channel we obtain the lowest value of subthreshold slope, OFF-current, and the highest value of threshold voltage and ON-to-OFF current ratio using 20-nm thick Air as the BOX insulator whereas the lowest intrinsic delay of 5.79 ns is obtained using HfO2 BOX thickness of 200 nm. Moreover, subthreshold slope and OFF-current can further be reduced concurrently improving threshold voltage and ON-to-OFF current ratio by thinning down the channel at the cost of increase in intrinsic delay.

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