Abstract
Optimization of a Ne/Ar/Kr/F2 gas mixture with respect to maximum KrF laser output has been performed. As an excitation source a transverse electron beam with a pulse length of 10 ns was used. The laser output obtained with a typical Ne/Ar/Kr/F2 mixture containing mainly Ne was found to increase linearly with Ne partial pressure. At a pressure of 14 bar the laser output energy exceeds the one achieved with an optimized Ar/Kr/F2 mixture by a factor of 4.5.
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