Abstract
In ion-beam experiments with MeV ions, the energy resolution of the detector and the energy spread of the incident ion beam restrict the energy and depth resolution. It is possible to deconvolve the measured spectra if the energy transfer function of the apparatus is known. However, this leads to an ill-posed problem. The Bayesian probability theory allows one to tackle consistently such types of problems. Using the maximum-entropy prior, it is possible to obtain the probability distribution for the desired energy and depth profiles. An enhancement of the energy resolution by a factor of 8 in Rutherford backscattering analysis of thin films, resulting in an energy resolution of about 2.5 keV with semiconductor detectors, is obtained.
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