Abstract
Epitaxial YBa 2Cu 3O 7 thin films were etched with low energy Ar ion at room temperature. It was found that, a substantial enhancement of the superconducting transition temperature was obtained at a short time milling for both electrical and magnetic measurement. The X-ray diffraction showed that the lattice frame of the sample was nearly unchanged after lower energy Ar ion milling. We suggest that the T c enhancement may be caused by the oxygen redistribution at low energy Ar ion milling.
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