Abstract

To improve the substrate-coating adherence of Nb-based boron-doped diamond (BDD) electrodes, laser surface texturing (LST) pretreatment was investigated. Substrates were textured by a Nd:YAG laser (1.06 μm radiation, 20 ns) with several laser parameters such as single pulse energy and scanning spacing, then coated with a BDD film by hot filament chemical vapor deposition (HFCVD). Characteristics of the substrates and BDD thin film electrodes were investigated. The results revealed that periodic valley-like structures were fabricated on substrate surfaces. LST pretreatment can significantly enhance the substrate-coating adherence of BDD electrode samples, and the laser cleaning step can effectively remove the surface oxide layer generated by laser pretreatment. Single pulse energy is a crucial influencing factor, the proper pulse energy can provide the best adherence property, providing sufficient surface treatment effect, promoting nucleation, release residual stress and promote the mechanical interlock. Suitable scanning spacing can further improve the coating adherence, and the match of scanning spacing and single pulse spacing can effectively avoid the directional peeling.

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