Abstract
Thin films of SnO2 were deposited by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at room temperature. XRD, SEM, and EDX measurements of thin films were investigated. Annealing of SnO2 thin films at 800 °С is polycrystalline and grain size of SnO2 in the range about 12 nm. The growth of SnO2 with annealing to 800 °C leads to the percolation nanorods structure. EDX clearly explains the rich of Sn reached 70% annealing. The conductivity of SnO2 nanorods has been increasing at room temperature for ethanol vapors.
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